The Fifth International Engineering Research Symposium, Düzce, Türkiye, 7 - 09 Mart 2024, ss.1
In this current work, a novel theoretical framework
is introduced to reveal the effect of the Coriolis force on a rotating
micro-cantilever. A forced Van der Pol-Rayleigh-Duffing oscillator model is
utilized to predict dynamic responses of the effective mass of the
micro-cantilever used in the micro-electro-mechanical gyroscope in the driving
and sense modes. Displacements of the micro-cantilever rotating at constant
angular velocity are obtained for different driving force strengths. The
simulation results indicate that the static equilibrium positions monotonically
change and displacement amplitudes become notably larger as the driving force
strength increases. Moreover, variations in time-varying Coriolis forces at the
first three flexural eigenmodes are explored for diverse angular velocities. It
is worth mentioning that the effect of angular velocity on the magnitude of
Coriolis force is relatively less at the second and third flexural eigenmodes
for the driving and sense modes. In addition, dynamic responses of the
micro-cantilever are observed for different Van der Pol-Rayleigh and Duffing
coefficients. As a result, in the present work, a new nonlinear dynamic model
is proposed to estimate rotating micro-cantilever responses under constant
driving force with the consideration of the Coriolis effect.