6th International Mediterranean Science and Engineering Congress (IMSEC 2021), Antalya, Türkiye, 25 - 27 Ekim 2021, ss.54-58
In this paper, we describe a numerical framework to investigate the effect of the ratio of driving force magnitudes at eigenmodes on the static acoustic force sensitivity. The Atomic Force Microscopy (AFM) micro-cantilever with rectangular cross-section is driven externally using the bimodal-frequency excitation scheme. The micro-cantilever is excited by applying external driving forces at first and second eigenmode frequencies simultaneously in bimodal-frequency excitation. Simulation results indicate that oscillation observables at first eigenmode vary slightly with increasing driving force ratio for diverse force magnitudes. In addition, there exist quite remarkable distinctions among amplitude and phase shift responses at second eigenmode for different driving force ratios. For our case, we obtain the highest phase shift response at the second eigenmode of around 37 degrees for the driving force at the first eigenmode of 35 pN with the driving ratio of 1.0 in the measurement of the acoustic force of 700 pN. Therefore, the numerical approach can be used for the optimization of excitation parameters to enhance observable sensitivities in multi-frequency excitation.