Applying the finite element method to investigate micro-cantilever responses to kHz acoustic forces in stationary mode (Accepted)
Springer Proceedings in Mathematics & Statistics, Robinson dos Santos, Editör, Springer, London/Berlin , Berlin, ss.1-5, 2026
- Yayın Türü: Kitapta Bölüm / Araştırma Kitabı
- Basım Tarihi: 2026
- Yayınevi: Springer, London/Berlin
- Basıldığı Şehir: Berlin
- Sayfa Sayıları: ss.1-5
- Editörler: Robinson dos Santos, Editör
- Akdeniz Üniversitesi Adresli: Evet
Özet
The present study demonstrates
the forced displacements of the fixed-free micro-cantilever under dynamic
acoustic forces within kHz range. The FEM method is applied to investigate
sensitivity of the AFM micro-cantilever to acoustic forces for the SPL range of
30 -70 dB. Oscillatory responses to varying length, width, and thickness of the
rectangular micro-cantilever are determined for enhanced sensitivity analysis.
The FEM results suggest that the amplitude responses becomes quite higher when
the width-to-thickness ratio reaches the critical value (w/t=50). Therefore,
the sensitivity of the micro-cantilever to kHz acoustic forces can be improved
by optimizing the micro-cantilever dimensions using the FEM technique.