Copy For Citation
HELHEL S., ÖKSÜZ L.
ELECO 2005, Turkey, 1 - 04 December 2005, vol.1, no.1, pp.1
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Publication Type:
Conference Paper / Full Text
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Volume:
1
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Country:
Turkey
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Page Numbers:
pp.1
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Akdeniz University Affiliated:
No
Abstract
Homogeneous Hydrogen plasma discharge driven by two
sinusoidal current sources has been analyzed. Two RF
sources, operating at 27.12MHz and 1.94MHz respectively,
are generally coupled to each other through the plasma
medium. We assumed time independent and collisionless
ion motion that gave us the analytic expressions for
discharge parameters as a function of frequency, current
and voltage. As a consequence, we have proposed that for
conventional CCRF plasma generated by driving one
electrode with a single RF power source can be improved by
finding the optimal characteristics for the discharge
operation or by introducing a secondary RF source. The
ratio of main RF source power to secondary RF source
power can be controlled for plasma density and plasma
uniformity.