Multiple Frequency Analysis of Capacitively Coupled RF Plasma

ELECO 2005, Turkey, 1 - 04 December 2005, vol.1, no.1, pp.1

Homogeneous Hydrogen plasma discharge driven by two

sinusoidal current sources has been analyzed. Two RF

sources, operating at 27.12MHz and 1.94MHz respectively,

are generally coupled to each other through the plasma

medium. We assumed time independent and collisionless

ion motion that gave us the analytic expressions for

discharge parameters as a function of frequency, current

and voltage. As a consequence, we have proposed that for

conventional CCRF plasma generated by driving one

electrode with a single RF power source can be improved by

finding the optimal characteristics for the discharge

operation or by introducing a secondary RF source. The

ratio of main RF source power to secondary RF source

power can be controlled for plasma density and plasma

uniformity.