Applying the Finite Element Method to Investigate Micro-cantilever Responses to kHz Acoustic Forces in Stationary Mode (Accepted)

Yılmaz Ç., Çelebi Ç.

6th International Symposium on Characterization, Bursa, Türkiye, 12 - 14 Ekim 2026, ss.1, (Özet Bildiri)

  • Yayın Türü: Bildiri / Özet Bildiri
  • Basıldığı Şehir: Bursa
  • Basıldığı Ülke: Türkiye
  • Sayfa Sayıları: ss.1
  • Akdeniz Üniversitesi Adresli: Evet

Özet

The present study demonstrates the forced displacements of the fixed-free micro-cantilever under dynamic acoustic forces within kHz range. The Finite Element Method (FEM) is applied to investigate sensitivity of the Atomic Force Microscopy (AFM) micro-cantilever to acoustic forces for the SPL range of 30 -70 dB. Oscillatory responses to varying length, width, and thickness of the rectangular micro-cantilever are determined for enhanced sensitivity analysis. The FEM results suggest that the amplitude responses become quite higher when the width-to-thickness ratio reaches the critical value (w/t=50). Moreover, the FEM results of forced displacements are compared with the ones obtained utilizing Reduced-Order Modeling (ROM) method and Laplace transform method. The theoretical results indicate that the oscillatory motions of the micro-cantilevers obtained using different computational techniques strongly depend on the acoustic force frequency. Virials of acoustic force interactions are also determined for the acoustic forces with different SPLs at diverse frequencies. Therefore, the sensitivities of the rectangular AFM micro-cantilevers to kHz acoustic forces can be explored by using the FEM technique.