10th Internatıonal Conference On Computatıonal And Experımental Scıence And Engıneerıng (ICCESEN-2023), Antalya, Türkiye, 27 - 30 Ekim 2023, ss.1
Resonantly
actuated micro-cantilevers are widely utilized to investigate the observable
sensitivities at the fundamental and higher eigenmodes to external forces in
single- and multi-frequency operations. Mainly, responses of the
micro-cantilevers to acoustic forces at various frequencies significantly vary
depending on the resonance characteristics of the micro-cantilevers. A
point-mass model of micro-cantilever dynamics can be used to acquire the
analytical responses to dynamic acoustic forces for diverse operational modes.
In this current work, firstly, the Laplace transform is applied to obtain the
open loop transfer functions of the dynamic systems for single- and
bimodal-frequency excitations. The variations in the corresponding locations of
poles and zeros are determined to demonstrate different instabilities of the
responses for varying acoustic force frequencies. In addition, magnitude and
phase responses to dynamic acoustic forces at distinct frequencies are revealed
for the first and second eigenmodes. Furthermore, analytical expressions of
displacements are utilized to observe resonant behaviors with the unit impulse
input. The results obtained using analytical expressions are compared and
validated with the numerical results achieved using the Fourth Order-Runge
Kutta method. The closeness of analytical results to numerical results proves
the validity of the analytical expressions for the oscillatory responses to
acoustic forces. Therefore, the approach which is designed and implemented in
this work is used to obtain a more complete description of the dynamics of the
resonant micro-cantilevers under dynamic acoustic forces.