3rd Emerging Technologies in Mechanical Engineering, Gangwon-Do, Güney Kore, 10 - 12 Aralık 2025, ss.1, (Özet Bildiri)
Multi-frequency excitation schemes are applied to resonate the micro-cantilever
for enhanced sensitivity to tip-sample interaction forces in AFM. During
AFM operations, external forces such as acoustic forces act on the
micro-cantilevers, thereby affecting their oscillating responses in different operating
mediums. Thus, the hydrodynamic loads owing to the fluidic mediums and the
influences of acoustic emissions on the behaviors of the micro-cantilever are
to be considered for accurate quantification of sensitivity to tip-sample
interaction forces. This paper presents theoretical research performed to
explore the vibrating behaviors of the periodically driven micro-cantilever under
van der Waals forces in methanol and ethylacetate mixtures. Dynamic acoustic
forces are assumed to act on the one-side area of the micro-cantilever,
actuated using biharmonic and bimodal excitation schemes. For particular
operating conditions, responses of the proposed dynamic model are compared with
the experimental results given in the literature, and the numerical results
demonstrate good agreement with the AFM measurements. It is also indicated that
application of biharmonic excitations yields notable enhancements in
sensitivity of amplitude, phase shift, and frequency shift at the particular separation
distances below 10 nm in air, when compared with the bimodal operations.
Moreover, vibration observables considerably change at the lower separation
distance where the nonlinear effect of van der Waals force is quite larger, as
the strength and frequency of the acoustic force increases in air. On the other
hand, the micro-cantilever does not exhibit remarkable sensitivity to acoustic
and hydrodynamic loads in different methanol and ethylacetate mixtures owing to
the higher damping effect. Therefore, the effects of acoustic emissions on the
micro-cantilever dynamics are to be considered for precise quantification of
tip-sample interaction forces during multi-frequency AFM operations in air.