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Plasma density measurements of confined capacitively coupled plasma by microwave interferometer and ion energy distribution function methods
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S. Helhel Et Al. , "Plasma density measurements of confined capacitively coupled plasma by microwave interferometer and ion energy distribution function methods," INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES , vol.27, no.11, pp.1497-1515, 2006

Helhel, S. Et Al. 2006. Plasma density measurements of confined capacitively coupled plasma by microwave interferometer and ion energy distribution function methods. INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES , vol.27, no.11 , 1497-1515.

Helhel, S., Ellingboe, A. R., Cerezci, O., & Gaman, C., (2006). Plasma density measurements of confined capacitively coupled plasma by microwave interferometer and ion energy distribution function methods. INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES , vol.27, no.11, 1497-1515.

Helhel, SELÇUK Et Al. "Plasma density measurements of confined capacitively coupled plasma by microwave interferometer and ion energy distribution function methods," INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES , vol.27, no.11, 1497-1515, 2006

Helhel, SELÇUK Et Al. "Plasma density measurements of confined capacitively coupled plasma by microwave interferometer and ion energy distribution function methods." INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES , vol.27, no.11, pp.1497-1515, 2006

Helhel, S. Et Al. (2006) . "Plasma density measurements of confined capacitively coupled plasma by microwave interferometer and ion energy distribution function methods." INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES , vol.27, no.11, pp.1497-1515.

@article{article, author={SELÇUK HELHEL Et Al. }, title={Plasma density measurements of confined capacitively coupled plasma by microwave interferometer and ion energy distribution function methods}, journal={INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES}, year=2006, pages={1497-1515} }